MEMS (Micro Electrical Mechanical System) in Space Application | Electrical Seminar Topic
MEMS (Micro Electrical Mechanical System) in Space Application
Micro Electro Mechanical Systems (MEMS) are the highly
miniature device or an array of devices combining electrical and mechanical
components that is fabricated using IC batch processing. MEMS are manufactured
by processes namely crystal growing, wafer preparation, film deposition,
oxidation, lithography, etching. In MEMS, a wide variety of transduction
mechanisms can be used to convert real world signals from one form of energy to
another, thereby enabling many different micro sensors, micro actuators and
micro systems.
Due to inherent advantages of batch fabrication technique,
integrability, ,these systems have wide scope of application. MEMS transducers
improve automotive control system and amends safety (case study). MEMS can
improve performance, but at the price of higher development costs, greater
complexity and a longer development time.
